Testing substrates (wafers, glasses) for matierial failure, outbreaks, cracks and contamination during the handling process.
Trends in Industry
Substrates are increasingly thinner an thus requiring an increeasingly safer and smoother handling. At the same time higher troughput and lower breakage rates are required.
Our solution: Using glass as material for the Sonotrodes
Using glass as material of the transfer systems, the substrate can be inspected by optical means through the glass. Thus it is also possible to inspect the subtrates from the backside without interfering edges (which are for example given for common conveyer belt system).
Advantages using the Ultrasonic Suspension
Smooth and non-contact handling.
Fast inspection of up to 3600 substrates/h.
Both backlight technique and refelection illumination can be used for substrate inspection.
Rapid integration of new or additional inspection modules.
No air-supply and -conditioning
No dynamic turbulences in surrounding gas
No negative influence on air-flow in clean-rooms
We have prepared several case studies you might be interested in.