Solarwafer in Ofen

Together with our research partners we have already worked for several years on the design of handling tools resistant to high temperatures.

Our latest product generation now successfully passed the tests in process environments up to 400°C (752°F). The sonotrodes (sound emitting sufraces) in this application have been made of stainless steel.

Thereby new areas of application for non-contact handling systems using Ultrasonic Suspension Technology can be opened up. Thermal processes have particular requirements on handling technology. Besides thermal stress for the handling tools

  • smooth and non-contact handling,
  • continuance of temperature distribution on the substrates,
  • no impact on the temperature profile of the production process by handling systems and
  • quick heating of the substrate without impact on the gripper device

are required.

We are offering the appropriate solution for your application. >>>

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