Our handling systems using the ultrasound air bearing can be applied in any atmospheric process. The ultrasound air bearing generates a supporting gas-film (air or process-gas) between its surface and the substrate. Thus, any mechanical contact is avoided. The substrate is hovering on the supporting gas film at a height of 50 - 500 μm.
The non-contact conveyors facilitate a smooth and friction free transport of substrates. The systems are designed as modules which can be assembled to arrays of any length and width.
Double-Sided Inspection of Substrates
We offer two approaches to realize a double-sided inspection of substrates
Intersection of the transfer system
with a gap up to 20mm. This gap can easily be crossed by the substrates while the inspection can be done through this gap (e.g. by optical sensors, linear cameras).
Using glass as material of the transfer system
The substrate can be inspected by optical means through the glass.
max. 300 W, 230 V AC (ultrasound)
PROFIBUS, PROFINET, EtherCAT, OPC
The ultrasound air bearing technology offers a series of benefits compared to state-of-the-art solutions:
No surface contact and therefore no damages due to non-contact handling
More degrees of freedom in process and machine design
High planarity of the substrate during transfer process
No mechanical contact between handling-device and substrate