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Technology
ULL ULL Kraft

Squeezefilm Levitation

The physics of the ultrasound-air-bearing derives more from fluid dynamics than from acoustic principles. The gas pressure in the gap between the workpiece and the vibrating surface of the sound generator rises due to the cyclic compression and decompression of the thin gas film. Therefore, it is necessary to create a uniform vibration-pattern in order to generate equal levitation forces throughout the whole vibrating surface. This is one of the core competences of Zimmermann & Schilp: we trim the sound!

 

Repelling Forces

Using the squeezefilm levitation, significant repelling forces can be generated between the sound source and the workpiece. Consequently, the workpiece can be moved without any friction. The force profile is similar to that of a conventional air bearing, however, no compressed air-supply is necessary. The ultrasound technology uses ambient air, or (process) gas at the interface, for pressure generation.

Your benefits
  • Lowest breakage-rates
  • Lowest energy-consumption
  • Modular design
  • No air-supply and -conditioning
  • No dynamic turbulences in surrounding gas
  • No negative influence on air-flow in clean-rooms
Applications
  • Semi-wafers and components
  • Photovoltaic-wafers and modules (PV)
  • TFTs / FPDs
  • Thin-film technology
  • MEMS and MOEMS
  • BioChips
  • Processed surfaces
  • Coated blanks
  • Surface-sensitve parts
  • Printed papers, foils and packaging materials
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